Ha lik'hamphani tsa meralo ea chip li ntse li tsoela pele ho hlaha, tlhoko ea lifilimi tsa pellicle bakeng sa lits'ebetso tsa Arf le Krf lithography bakeng satlhahiso ea liphaephee fetisitse theko mme e eketsehile.
Pejana selemong sena, morekisi oa thepa e tala 3M o ile a tlameha ho koala feme ea hae Belgium ho latela melao ea lehae.melao ea tšireletso ea tikoloho, ho nyoloha ha theko ea lihlahisoa tse tala ho lebisitse ho theko e phahameng ea lifilimi tsa mask, 'me ho kopana pakeng tsa baetsi ba lifilimi tsa mask a Majapane le hona ho liehisa tlhahiso ea lihlahisoa tse amanang le phepelo e thata.Ntle le moo, bahlahisi ba 'maloa ba lifilimi tsa mask le bona ba nts'etsapele liphahlo tse ncha bakeng sa li-node tse tsoetseng pele joalo ka EUV, e leng se bakang ho theoha ka kakaretso ha tlhahiso.
Mofani oa lifilimi tse sireletsang tsa photomask oa Korea BoroaFSTe lebelletsoe ho eketsa karolo ea lekhetho la kantle ho naha ea mask selemong sena ho tloha ho 30% selemong se fetileng ho isa ho 40% selemong sena.
Nako ea poso: Dec-14-2022